MEMS jumpstart series: Creating a resonator

Internet of Things (IoT) applications depend on smart objects that interact with the real world. These objects can contain micro electro-mechanical systems (MEMS)-based sensors that convert physical or chemical actions into data that is collected for analysis. A key building block for sensor design is the resonator. Resonators are crucial for devices that include: timing references, mass recording, motion sensing, biological sensing, signal filtering and energy harvesting.