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Meeting MEMS design challenges with unique verification features – Part 2

Meeting MEMS design challenges with unique verification features – Part 2

MEMS geometry and issues with all-angle rotation of touching objects.
MEMS geometry and issues with all-angle rotation of touching objects.
This two-part paper describes how and why support and ease of use for implementation of irregular shapes, including curves and all-angle polygons, is a critical criterion differentiating MEMS-oriented CAD tools from conventional IC-oriented tools. Part 2 focuses on the verification of the MEMS layout.

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