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Meeting MEMS design challenges with unique layout editing features – Part 1

Meeting MEMS design challenges with unique layout editing – Part 1

MEMS magnetic actuator, accelerometer and rotary side drive motor.
MEMS magnetic actuator, accelerometer and rotary side drive motor.
This two-part paper describes how and why support and ease of use for implementation of irregular shapes, including curves and all-angle polygons, is a critical criterion differentiating MEMS-oriented CAD tools from conventional IC-oriented tools. Part 1 focuses on creating the MEMS layout.

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