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white paper

Enhanced model-based hinting fixes multi-layer lithographic hotspots

All foundries require lithographic process verification for standard cells and design IP blocks. To avoid creating new hotspots during fixes, EDA tools for litho checking provide model-based repair hints to the designer. However, most MBH solutions focus on DRC checks only for the layers that contain a hotspot, which complicates hotspot fixing in multi-patterned designs. Extending DRC rules to include multiple-layer DRC checks and rules for different masks enables MBH to consider DRC fixes between different layers.

Enhanced model-based hinting improves litho hotspot repair in advanced node designs

New algorithms that can consider DRC between different layers, enclosure rules between metals and vias or contacts, and complex MP spacing constraints enable more accurate analysis, while adding more flexibility to generated hints by enabling the engine to suggest moving complete metal polygons (including any enclosed via), not just a group of edges. Adopting an enhanced MBH flow can help design companies deliver advanced node designs on schedule while ensuring they comply with all design rules and MP constraints, and deliver the intended performance.