white paper
CMP simulation-based dummy fill optimization
CMP simulation-driven dummy fill optimization process
Modeling the CMP process provides a simulated post-CMP profile whose data can be used for dummy fill optimization. A CMP simulation-driven dummy fill optimization method using the Calibre CMPAnalyzer, Calibre CMP ModelBuilder, and Calibre YieldEnhancer with SmartFill tools can reduce the time and resources required to find and fix planarity hotspots while ensuring the optimal fill solution is used.