Assume Nothing: Clearing Up Common Misconceptions About Multi-Patterning

Multi-patterning makes IC design and manufacture possible at advanced nodes. However, the complexity of the process, and the potential costs of failure, speak to the need for a clear understanding of the process and its limitations. Eliminating any misconceptions and assumptions surrounding the decomposition of layouts is a necessary step in the effective and efficient use of multi-patterning technology.

Multi-patterning processes

Many designers think of multi-patterning decomposition and coloring checks as similar to design rule checking. In fact, it operates much more like place and route or dummy fill, with many legal solutions. Understand­ing how and why multi-patterning works can help you understand and eliminate the MP issues you encounter in your layouts. We review some fundamental concepts of litho-etch double, triple and quadruple patterning strategies, and how we might all consider changing our expectations based on these concepts.