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fact sheet

Tanner MEMS Design Flow

A central part of the design flow is Tanner L-Edit MEMS, an advanced layout editor with MEMS-friendly capabilities such as curved polygons and all-angle Boolean operations. In contrast to other CAD tools designed for mechanical engineering, L-Edit MEMS shows clear and dark fields of the masks. As a result, you can quickly draw and edit masks, and then easily view different combinations of masks to examine their overlaps and interactions. Using powerful features such as excellent curve support, interactive DRC, Boolean operations, object snapping, and alignment, you can work more efficiently to save time and money. L-Edit MEMS gives greater precision by performing complex Boolean and derived layer operations with polygons of arbitrary shape and curvature.